| 摘要 |
<p>A gas sensor is constructed to detect and measure concentrations of a target matter in either a microenvironment or in normal applications. A piezoresistive layer is mechanically coupled to a chemical sensitive layer. The reaction of the target matter with the chemical sensitive layer creates an induced strain in the chemical sensitive layer. This induced strain in the chemical sensitive layer in turn causes stress to be applied to the piezoresistive material. The applied stress results in a change in resistance of the piezoresistive material. This change in resistance is a measure of the concentration of the target matter that is interacting with the chemical sensitive layer.</p> |
