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发明名称
Verfahren und Verdampfer zur plasmachemischen Reinigung von Substraten
摘要
申请公布号
DE4414263(C2)
申请公布日期
2000.07.06
申请号
DE19944414263
申请日期
1994.04.23
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
GUNSILIUS, HARALD;OEHR, CHRISTIAN
分类号
B08B7/00;C23G5/00;H01L21/306;(IPC1-7):B08B7/00;C23F4/00
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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