发明名称 |
METHOD OF MANUFACTURING A VIBRATING STRUCTURE GYROSCOPE |
摘要 |
A vibrating structure gyroscope is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9), attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), forming one more layer of patterned photoresist material on the structure and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).
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申请公布号 |
WO0039525(A1) |
申请公布日期 |
2000.07.06 |
申请号 |
WO1999GB04298 |
申请日期 |
1999.12.17 |
申请人 |
BRITISH AEROSPACE PUBLIC LIMITED COMPANY;FELL, CHRISTOPHER, PAUL;TOWNSEND, KEVIN;STURLAND, IAN |
发明人 |
FELL, CHRISTOPHER, PAUL;TOWNSEND, KEVIN;STURLAND, IAN |
分类号 |
G01C19/5684;(IPC1-7):G01C19/56 |
主分类号 |
G01C19/5684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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