| 摘要 |
A piezoelectric micropump (10) is disclosed for pumping fluid from a contain er (14) to a delivery point in low volumes and at controlled flow rates. The pumping action is created by movement of two or three diaphragms (40, 42, 44 ). The movement of each diaphragm is caused by expansion and contraction of an attached piezoelectric actuator (46, 48, 50). Coordination of the movement o f the diaphragms (40, 42, 44) creates unidirectional flow of the fluid. The piezoelectric actuators (46, 48, 50) are cantilevered between the pump body (22) and the diaphragms (40, 42, 44) to provide greater deflection of the diaphragms (40, 42, 44). The piezoelectric actuators (46, 48, 50) preferably are piezoelectric bimorphs such that the diaphragms (40, 42, 44) can functio n as both seals and pumps.
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