Sensor for measuring concentration of one or more gases or air humidity,

摘要

The sensor has a flexible plate (1) held within a frame (2). The plate has a uniform polymer coating (3) of a laterally structured material, whose volume and hence compression varies in response to the concentration of the gas in question. The sensor has a flexible plate (1) held within a frame (2). The plate has a uniform polymer coating (3) of a laterally structured material, whose volume and hence compression varies in response to the concentration of the gas in question. In addition, the sensory coating incorporates additional ions or atoms either in the surface zone or inner layers (3a). These change the null point, stroke and sensor non-linearity. The ions or atoms are especially boron, argon, fluorine, phosphorus implanted with an energy of between 50 keV and 2 MeV, and within a given dose range.