发明名称 METHOD FOR PRECISE MOLDING AND ALIGNMENT OF STRUCTURES ON A SUBSTRATE USING A STRETCHABLE MOLD
摘要 A method for molding and aligning microstructures on a patterned substrate using a microstructured mold. A slurry containing a mixture of a ceramic powder and a curable fugitive binder is placed between the microstructure of a stretchable mold and a patterned substrate. The mold can be stretched to ali gn the microstructure of the mold with a predetermined portion of the patterned substrate. The slurry is hardered between the mold and the substrate. The mo ld is then removed to leave microstructures adhered to the substrate and aligne d with the pattern of the substrate. The microstructures can be thermally heat ed to removed the binder and optimally fired to sinter the ceramic powder.</SDO AB>
申请公布号 CA2352769(A1) 申请公布日期 2000.07.06
申请号 CA19992352769 申请日期 1999.03.31
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 KING, VINCENT W.;DILLON, KENNETH R.;HUMPAL, PAUL E.;HOOPMAN, TIMOTHY L.;CHIU, RAYMOND C.
分类号 H01J9/02;B29C33/30;B29C33/40;B29C33/42;H01J9/24;H01J11/02;H01L21/027;(IPC1-7):H01J9/24 主分类号 H01J9/02
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