Surface cleaning method for low temperature microscopy and spectroscopy uses glow discharge of argon gas

摘要

The method uses a pump and a gas discharge unit. After a vacuum has been pumped, an ion fire is generated on the solid surface with a glow discharge of argon gas from the gas discharge unit. When the gas discharge is discontinued, temperatures below 10K and partial pressures in the ultra high vacuum region are produced. An Independent claim is included for producing a clean solid surface in a microscope or spectroscope at very low temperatures.