Scanning microscopy method e.g. for material physics, chemical structure analysis, functional genome analysis, evolutive biotechnology, protein analysis, or medical diagnostics, with on-line detection of measuring volume position

摘要

The scanning microscopy method has an examined entity positioned on a substrate (60) scanned by a measuring volume (70), using a radiation source (10), e.g. a laser and a confocal or multi-photon excitation optical system (32). A second radiation source (11) and a further optical system (34) provides an auxiliary focus (71) in a defined position relative to the scanned entity, with retroreflection used for detecting the position of the auxiliary focus, for indirect position detection of the measuring volume.