| 摘要 |
PURPOSE: A radio frequency generator is provided to generate radio signals having various frequencies, thereby adapting a process condition to characteristics of a product using a necessary radio frequency according to the process condition. CONSTITUTION: An oscillator(100) includes an oscillation circuit(112), a plurality of vibrators(114) and a switch circuit(116). A vibrator which is connected to the oscillation circuit(112) uses the crystal vibrator(114). The crystal vibrator(114) is connected to the switch circuit(116) in order to generate radio signals having desired frequencies as well as a frequency of 13.56MHz which is used in a typical oscillator. The switch circuit(116) is connected to the desired one of the crystal vibrators(114) according to an external signal in order to satisfy the necessary process condition, so that the radio signals having various frequencies.
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