NOZZLE STAGE OF SPINNER

摘要

PURPOSE: A nozzle stage of a spinner is provided to prevent damage of a nozzle or a nozzle stage by making a guide hole in the nozzle stage. CONSTITUTION: A nozzle stage(10) of a spinner comprises a body(11) and a guide hole(12). The spinner comprises a rotating table for mounting a wafer on, an axis of revolution for transmitting a rotating force connected to the rotating table, one or more nozzles for coating photoresist on the wafer, and a working reservoir for preventing the photoresist from being spreading around. The nozzle(20) in inserted into the body(11). The guide hole(12) is a square-shaped through hole, which guide the nozzles(20) at the same time.