| 摘要 |
PURPOSE: A fetch arm of a stepper is provided to prevent a crack of the fetch arm and to improve a unifying force of a fastening screw. CONSTITUTION: A stepper being a kind of an exposure equipment includes a fetch arm(11) which puts a wafer into or out a supplying part of the stepper. The fetch arm(11) is combined with both an upper cover(15) and a lower frame(13) by fastening screws(17). A rubber pad(19) is inserted between the cover(15) and the frame(13), so that a pressure transmitted to the fetch arm(11) from a tightening force of the screws(17) is considerably relieved by the rubber pad(19). Moreover, since a washer(21) such as a spring washer is fitted onto the fastening screw(17), the fastening screws(17) are not easily loosened.
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