METHOD FOR MANUFACTURING DIELECTRIC FILM AND CELL CAPACITOR MANUFACTURED BY USING THE METHOD

摘要

PURPOSE: A method for manufacturing a dielectric film and a cell capacitor are provided to prevent the dielectric film from the chemical fault by restraining the creation of impurities when an alkyl metal is oxidized. CONSTITUTION: A trimethyl aluminum(200) is supplied as a source for forming an alumina film. An oxidized gas without hydrogen is supplied so as to react with the trimethyl aluminum source(200). The oxidized gas includes O3(210). The oxidized gas includes an activated oxygen radical. The alkyl metal is supplied as a source for forming a dielectric film. The dielectric film is one selected from a group consisting of Al2O3, TiO2, ZrO2, HfO2, Ta2O5, Nb2O5, CeO2, Y2O3, SiO2, N2O3.