APPARATUS FOR REMOVING FOREIGN PARTICLE IN SEMICONDUCTOR TCP EQUIPMENT

摘要

PURPOSE: An apparatus for removing a foreign particle in a semiconductor tape carrier package(TCP) equipment is to remove a movable foreign particle attached to the TCP tape, thereby preventing the generation of a short failure. CONSTITUTION: An apparatus for removing a foreign particle in a semiconductor TCP equipment comprises a load part(100) at which a reel(130) around which a space tape(110) and a TCP tape(120) for an inner lead bonding are wound is installed; a main body part(200) into which the TCP tape is transferred and at which the inner lead bonding is performed; an unload part(300) for winding the TCP tape which the inner lead bonding process is completed in the main body part; a foreign particle removing part disposed at a moving path of the TCP tape, for removing foreign particles attached to the TCP tape; and a metal net disposed below the load part and the unload part, for passing through the foreign particle.