SURFACE PROCESSING METHOD

摘要

PURPOSE: A surface processing method is provided to make a processed material having excellent wear resistant, oxidation resistant and fatigue resistant characteristics by forming a magnetite after forming a nitride layer on the surface of the processed material with plasma. CONSTITUTION: A processed material is inserted in a vacuum chamber in which a plasma process is possible and is heated at more than 300°C. A nitride layer is formed on the surface of the processed material, and an oxide layer is formed on the surface of the processed material with a plasma oxidation method. The surface of the processed material formed with the nitride layer is activated by using the plasma. Herein, the nitride layer is composed of at least more than one nitride among epsilon phase and gamma prime phase, and the temperature of the processed material is 450 to 600°C on the plasma oxidation. Further, the atmosphere gas includes at least more than two things among nitride, oxygen, hydrogen gas upon the plasma oxidation.