发明名称 OPERATION MIRROR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: An operation mirror structure and an operation mirror structure fabricating method are provided to freely determine the heights of posts by forming the posts by electric gilding. CONSTITUTION: Ground electrodes are formed on the upper surface of a substrate. Posts(31,32) are formed on the substrate by electric gilding. Ends of hinges(21,22) are engaged with the posts(31,32). An operation mirror(20) is rotatively installed to the hinges(21,22). An address electrode is formed on the upper surface of the substrate opposite to the bottom surface of the operation mirror(20) to drive the operation mirror(20) by the electrostatic force. The hinges(21,22) are engaged with the posts(31,32) by deposition.
申请公布号 KR20000037767(A) 申请公布日期 2000.07.05
申请号 KR19980052514 申请日期 1998.12.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, BONG SU
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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