PARTICLE SUCTION TOOL OF EXPOSURE EQUIPMENT

摘要

PURPOSE: A particle suction tool is provided to effectively remove particles generated by friction between a belt and a pulley in an exposure equipment. CONSTITUTION: In an exposure equipment, conveyance of wafers and reticles is carried out by reciprocal action between a pulley(1) and a belt(2). A particle suction tool(3) such as a suction pipe, preferably a funnel-shaped pipe, is equipped directly in each unit of the exposure equipment in the vicinity of the pulley(1) and the belt(2), and separately from other sub-pipes without passing by an additional air pressure box. The particle suction tool(3) facilitates a removal of particles generated by friction between the pulley(1) and the belt(2), so that a life span of the equipment is extended and productivity is improved.