APPARATUS AND METHOD FOR AUTOMATIC OPERATION STOP OF EQUIPMENT

摘要

PURPOSE: An apparatus and method for automatic operation stop of an equipment is provided to prevent disuse of a working object and reworking by returning a stand-by object to an original storage space and performing an object in which a work is progressed according to all contents of a working recipe to return the object to the original storage space. CONSTITUTION: A measuring instrument server(220) and an equipment server(230) control an equipment measuring instrument(400) and an equipment(100) according to a command of a host(210). The host(210) monitors a measured result to each class to store the measured result, compares the measured result with a specification stored in a database(300), and command the stopping of an operation of the equipment(100) to the equipment server(230) when the measured result is differed from the specification. The equipment server(230) stops the operation of the equipment(100). A worker interface(500) is connected to the host(210). A worker identifies a measured result of the measuring instrument(400) directly through the interface(500) and controls the host(100) so that the host(100) commands the stopping of the operation of the equipment(100).