CLAMP RING FOR SEMICONDUCTOR WAFER

摘要

PURPOSE: A clamp ring for a semiconductor wafer is provided to prevent the wafer from being damaged by securely fixing the wafer without applying an exceed force to the wafer. CONSTITUTION: A clamp ring(10) for fixing a semiconductor wafer(20) comprises a ring body(11) having a circular shape. The ring body(11) has an inner diameter larger than an outer diameter of the semiconductor wafer(20). The clamp ring(10) also comprises a wafer holder jig(13). The wafer holder jig(13) is coupled to the ring body(11). The wafer holder jig(13) pushes an edge portion of the semiconductor wafer(20) by using an elastic force thereof. The wafer holder jig(13) is coupled to a lower portion of the ring body(11) by means of a coupling device(15).