FLUID INJECTING APPARATUS HAVING SINGLE FILM OF MEMBRANE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A method for manufacturing a fluid injecting apparatus having a single film of membrane is provided to prevent an isolation of a film of membrane by forming the membrane with a single film, thereby improving the quality and reliability of a fluid injecting apparatus. CONSTITUTION: A method for manufacturing a fluid injecting apparatus having a single film of membrane includes the steps of forming an electrode(112) and a heating element(113) on a board(115), stacking a driving fluid barrier(116) on the electrode and the heating element on the board, forming an adhesive layer(117) on the driving fluid barrier, forming a mask on the adhesive layer and performing an anisotropic etching the adhesive layer and the driving fluid barrier simultaneously for forming a driving fluid chamber(111), forming a single film of membrane(120) on the adhesive layer, and forming a nozzle part on the membrane.