发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR
摘要 PURPOSE: A semiconductor device and a method for fabricating a thin film transistor are provided to improve the reliance of the semiconductor device by reducing the damage of elements caused by a photoresist film. CONSTITUTION: A semiconductor substrate(1) is prepared. An amorphous silicon(54) is deposited on the semiconductor substrate(1). A multi crystalline silicon(52) is formed on the semiconductor substrate(1) by crystallizing the amorphous silicon(54). A doping block is deposited on the multi crystalline silicon(52). The doping block is made of a semiconductor material. Then, a photoresist(PR) is coated on the amorphous silicon(54). The photoresist(PR) is then subjected to a patterning process. When the photoresist(PR) is patterned, the doping block is also patterned.
申请公布号 KR20000040706(A) 申请公布日期 2000.07.05
申请号 KR19980056420 申请日期 1998.12.19
申请人 LG.PHILIPS LCD CO., LTD. 发明人 LEE, JONG HUN
分类号 H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L29/786
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