发明名称 DEVICE FOR TRANSPORTING AND DRAWING OF MODULE DEVICE
摘要 PURPOSE: A device for transporting and drawing of module device is provided; to transport module device to a manufacturing device or a storing device; to draw module device from a manufacturing device or a storing device. CONSTITUTION: A device for transporting and drawing of module device comprises a guide/support step to support a tray and to lead the tray to line movement, a detecting step to detect the tray and a limit transporting point of the tray, an aligning step to align the tray, and a transporting device part to feed the tray to or to draw the tray from a manufacturing device or a storing device. Left/right tray guide rails(92, 92') support the tray. A stopper block(120) and a sensor block(99) restrict a line movement section. The sensor block(99) contains a tray detecting sensor(98). When the tray is fed to the manufacturing device or the storage device, a first sensor(110) detects a first sensor plug(44) and notifies to a host computer the tray reaches on the end point. A second sensor(112) detects the first sensor plug(44) and notifies to the host computer the tray is started to transport. The host computer controls the transporting device part to move following the detect signal from the second sensor(112) and controls the transporting device part to stop following the signal from the first sensor(110). The tray detecting sensor(98) detects the tray and sends a signal to the host computer. The host computer controls a push block(109), a lateral adjusting cylinder(84), a longitudinal adjusting cylinder(100), and finger(88), and aligns the tray. After aligning the tray, an L-type latch(58a) rotates toward the tray by a cylinder(80). The host computer moves a motor(4) to transfer the tray and stops the motor(4) after arriving goal position. The L-type latch(58a) is rotated to drop the tray by the cylinder(80).
申请公布号 KR20000038350(A) 申请公布日期 2000.07.05
申请号 KR19980053318 申请日期 1998.12.05
申请人 YUIL SEMICON CO., LTD. 发明人 JANG, SEONG HWAN
分类号 H01L21/50;H01L21/68;(IPC1-7):H01L21/50 主分类号 H01L21/50
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