发明名称 |
Scanning electron microscope |
摘要 |
A scanning microscope is provided for producing a scan image at high spatial resolution and in a low acceleration voltage area. An acceleration tube is located in an electron beam path of an objective lens for applying a post-acceleration voltage of the primary electron beam. The application of an overlapping voltage onto a sample allows a retarding electric field against the primary electron beam to be formed between the acceleration tube and the sample. The secondary electrons generated from the sample and the secondary signals such as reflected electrons are extracted into the acceleration tube through the effect of an electric field (retarding electric field) immediately before the sample. The signals are detected by secondary signal detectors located upwardly than the acceleration tube.
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申请公布号 |
US6084238(A) |
申请公布日期 |
2000.07.04 |
申请号 |
US19980044700 |
申请日期 |
1998.03.20 |
申请人 |
HITACHI, LTD. |
发明人 |
TODOKORO, HIDEO;EZUMI, MAKOTO |
分类号 |
H01J37/244;H01J37/256;H01J37/28;H01J37/285;(IPC1-7):H01J37/256 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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