SUBSTRATE INSPECTING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate inspecting system which can judge whether or not a substrate is supplied to a substrate inspecting part in correct orientation, thereby avoiding wasteful inspection to the substrate. SOLUTION: The system is provided with a board inspecting part 6 with an inspecting terminal 12 which comes in touch with an electrode terminal of an engine board 50 to be inspected, a transfer rail 31 for transferring the board 50 to supply to an inspection position in the vicinity of the board inspecting part 6 and discharge from the inspection position, and a drive means (step motor) for driving the transfer rail 31 for the board 50 to bring the board inspecting part 6 and the board 50 at the inspection position close to each other to make the electrode terminal and the inspecting terminal 12 touch each other. In this case, a through hole 50a and a guide pin 14 are formed respectively to the board 50 and the board inspecting part 6 to be engaged with each other when the board 50 and the board-inspecting part 6 approach to have the electrode terminal and inspecting terminal 12 touch with each other. A reflecting light sensor 34 is set for detecting whether the through hole 50a of the board 50 and the guide pin 14 of the board inspecting part 6 are engaged with each other or not.