| 摘要 |
PROBLEM TO BE SOLVED: To appropriately operate a vacuum pump device by dealing with high temperature gas without cooling it. SOLUTION: Mechanical seals 51, 52 are arranged on housing sides of bearings 351, 352 supporting shafts of a vacuum pump. An oil tank 40 is arranged outside the vacuum pump for storing lubricating oil. An oil pump is attached to the oil tank for circulating the lubricating oil. A suction port of the oil pump communicates with the oil tank, while a discharge port communicates with oil feed pipes 311, 312 communicating with mechanical seal support bodies of gear and driving sides. An oil return passage 43 is led to the oil tank.
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