摘要 |
An electric field emission cold cathode which is free of short-circuited damage upon discharge is provided by forming a highly voltage-withstandable control mechanism, which is capable of limiting generation of current upon discharge, with a simple structure and through simple fabrication processes. The electric field emission cold cathode includes a sharp-pointed emitter, a gate electrode having an aperture surrounding the emitter, and a cathode electrode connected to the emitter. The electric field emission cold cathode further includes an n-type diffused layer connected to the emitter and the cathode electrode, and a p-type silicon substrate electrically connected to the cathode electrode at least at a side thereof facing the emitter. A pinch-off resistor is provided between the emitter and the cathode electrode. The pinch-off resistor has a saturation current value smaller than a short-circuit breakdown current of the emitter.
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