| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a high-precision organic thin film EL device capable of separating and forming a luminescent part formed of an organic EL material or electrodes at a fine pitch of tens of microns in a matrix-like shape on a substrate by using a pattern mask in a vacuum deposition method. SOLUTION: The positional setting, and movement amount and speed control of a pattern mask moving stage 8 having a pattern mask mounted are performed in a vacuum deposition device with an X-axis or Y-axis motor 4 by means of a digital input command system (incremental command) including a feedback system. Since the pattern mask in a vacuum chamber can be moved by a precise fine movement mechanism using the pulse motor, the correct positioning between a board and the pattern mask is simplified, and since the fine movement of the pattern mask is controlled according to the number of pulses of the pulse motor, a luminescent part having a fine pitch, for instance, a pitch of tens of microns can be formed.</p> |
