| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method and a measuring device, capable of measuring a minute displacement by generating laser interference according to the minute displacement with optical fiber. SOLUTION: This minute displacement measuring device comprises a laser light source 1, a collimator lens 2 for collimating laser light emitted from the light source 1, a beam splitter 3, a condenser lens 5A for condensing passed return light flux through the beam splitter 3 after reflected on a test body 4, a condenser lens 5B for newly condensing passed reference light flux through the beam splitter 3 after collimated by the collimator lens 2, a projection means 8 for superimposing and projecting light waves from first and second optical fibers 6, 7 by arranging and fixing end parts of the optical fibers 6, 7 in parallel at a prescribed distance, an image sensor 9 for converting projection interference fringes obtained according to the projection from the projection means 8 into an electric signal, and an output means for outputting a displacement amount of the test body 4 on the basis of a phase displacement of the projection interference fringes obtained by the image sensor 9, according to the displacement in the optical axis direction of the test body 4.
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