| 摘要 |
PROBLEM TO BE SOLVED: To appropriately operate a vacuum pump device by dealing with high temperature gas without cooling it. SOLUTION: Mechanical seals 51, 52 are arranged on housing sides of bearings 351, 352 supporting shafts of a vacuum pump. An oil pump 25 is attached to one shaft end for feeding lubricating oil 281, 282. A suction port of the oil pump communicates with the lubricating oil in a gear side oil tank 271 housing a gear, while a discharge port 29 communicates with oil feed pipes 311, 312 communicating with mechanical seal support bodies of gear and driving sides. An oil return passage 36 is led from a driving side oil tank 272 to the gear side oil tank 271.
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