| 摘要 |
PROBLEM TO BE SOLVED: To eliminate dangers of breaking a movable part because of dropping or the like and that acceleration cannot be measured. SOLUTION: This sensor has a silicon substrate 1A and a pair of glass substrates 6A and 7A anodically joined to both primary faces of the silicon substrate 1A. The silicon substrate 1A is constituted of a pair of fixed electrodes 2A and 3A, a mass body 4Aa arranged between the electrodes, a beam and an anchor for supporting the mass body 4Aa movably via the beam, including a movable electrode 4A and an outer frame 5A. Gaps XA and YA are formed between the mass body 4Aa and the glass substrates 6A, 7A respectively. An aluminum layer 8 is vapor deposited as a buffer material for buffering a collision of the mass body 4Aa and the glass substrate at least to one of opposite faces where the mass body 4Aa is opposite to the pair of glass substrates 6A and 7A at least at one side of the primary faces of the mass body 4Aa.
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