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发明名称
摘要
申请公布号
JP3058655(B2)
申请公布日期
2000.07.04
申请号
JP19900157311
申请日期
1990.06.15
申请人
发明人
分类号
H01L21/223;H01L21/22;H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/223
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代理人
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