| 摘要 |
PROBLEM TO BE SOLVED: To quicken response as compared with a fluid ejector of heating type or thermocompression type by generating an electrostatic force between a membrane and a lower electrode and imparting a driving force to a fluid in an ejection fluid chamber thereby ejecting a specified quantity of fluid to the outside of a nozzle. SOLUTION: A fluid ejector has a structure where an insulation layer 114, a lower electrode 122, a spatial barrier wall layer 124, a membrane 140, an ejection fluid barrier wall layer 132 and a nozzle plate 134 are laminated sequentially on a silicon substrate 112. The membrane 140 formed on the lower electrode 122 and the spatial barrier wall layer 124 constitute a heating drive section and an ejection fluid chamber 136 for containing a fluid is formed between the nozzle plate 134, the ejection fluid barrier wall layer 132 and the membrane 140. The nozzle plate 134 is provided with a nozzle 138 for ejecting the fluid in the ejection fluid chamber 136 and an upper electrode 146 is displaced up and down by an electrostatic force generated between the upper electrode 146 and the lower electrode 122 thus driving the membrane 140.
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