发明名称 |
Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems |
摘要 |
Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is caused to continuously rotate in a rotating compensator ellipsometer system. Also disclosed is a method of calibration of an ellipsometer/polarimeter system which includes a present invention compensator/retarder system.
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申请公布号 |
US6084675(A) |
申请公布日期 |
2000.07.04 |
申请号 |
US19990246888 |
申请日期 |
1999.02.08 |
申请人 |
J. A. WOOLLAM CO. INC. |
发明人 |
HERZINGER, CRAIG M.;JOHS, BLAINE D. |
分类号 |
G01J3/28;G01J4/00;G01N21/21;(IPC1-7):G01J4/00 |
主分类号 |
G01J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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