| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a simple and inexpensive semiconductor wafer cassette opening and closing device which dispenses with installation space in a clean room and can be used in common with processing units by eliminating a linear mechanism and an installation base for positioning and installing the device in a space of a processor or on an automatically guided vehicle(AGV), etc. SOLUTION: A communication interface part, a control part, a drive part, a drive means, and a power source part are incorporated in a case 2 and a latch key 3 engaged with the drive means is projected on the surface panel of the case. The drive means is driven with an external control signal and the latch key 3 is rotated by 90 deg. to open and close the lid of a semiconductor wafer cassette.</p> |
