| 摘要 |
PROBLEM TO BE SOLVED: To improve the process precision and product quality of a device and to improve the throughput. SOLUTION: This device manufacturing apparatus which is covered with a chamber for holding a device main body main body in an optimal state is provided with a means which detects a hoop 5 for carrying a substrate placed at a substrate carry-in part and a means which connects the chamber and hoop 5 together in terms of functions, where the substrate is placed in an optimal state for a process in the device manufacturing apparatus according to the detection output of the detecting means. |
