发明名称 THERMALLY STABILIZED ACTUATOR/SENSOR STRUCTURE AND THEIR MANUFACTURE
摘要 <p>PROBLEM TO BE SOLVED: To optimize both thermal expansion coefficient and operating intensity. SOLUTION: First, a ceramic actuator/sensor is sealed into a capsula formed of a first capsular material and next, it is sealed into a capsule formed of a fiber-reinforced composite materials 20, 22 to form a single- or double- capsulated actuator/sensor package 14. Combination of the fiber-reinforced composite material and lay-up angleθis used to control the composite thermal expansion coefficient(CTE) and selection of rigidity of package or compliance in regard to the selected axial line. The zero CTE or CTE suitable for that of base material 24 can be obtained by selecting optimum material and lay-up angleθbased on the adequate operating intensity. Simultaneously, the operation intensity in the selected operating direction can be maximized. The base material structure having extremely lower rigidity can be designed by applying this method to the precise structure, because precise and thermally stabilized instruction and shape forming operation force can be attained with a thermally stabilized method.</p>
申请公布号 JP2000188432(A) 申请公布日期 2000.07.04
申请号 JP19990354112 申请日期 1999.12.14
申请人 TRW INC 发明人 MICHAEL J TORAIRAA;CHRISTOPHER W FELTZ;CATHERINE M DOHERTY;RISA R HILL;CRAIG A LAVINSKI
分类号 H01L41/09;H01L41/053;H01L41/08;H01L41/22;(IPC1-7):H01L41/09 主分类号 H01L41/09
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