| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacture method for making the surface heights of projecting electrodes formed on an opposite substrate to be uniform in the two-dimensional image detector of structure, where the facing substrate and an active matrix substrate are stuck with anistoropic conductive adhesive. SOLUTION: In the manufacture method of a two-dimensional image detector, a mask 18 having opening parts 17 on the almost the whole face of the sticking face of the facing substrate 2, where a semiconductor layer 13 having high electrical conductivity is formed on almost the entire face. Polishing particles 19 are sprayed on the mask 18, and grooves 20 are formed by cutting the semiconductor layer 13. Then, the projecting electrodes 21 whose surface heights are uniform can be obtained by removing the mask 18.
|
