FILLING METHOD OF PASTE INTO THROUGH HOLE

摘要

PROBLEM TO BE SOLVED: To provide a filling method in which a paste can be filled into a through hole with high filling efficiency, and which can prevent the generation of a defect due to a stringing operation when a screen is separated. SOLUTION: A screen 3 is piled up on a substrate 2 in which a through hole 1 is formed. A squeegee 4 is moved along the surface of the screen 3. A paste 5 on the screen 3 is rubbed by the squeegee 4. The paste 5 is filled into the through hole 1 through the screen 3. At this time, the filling operation of the paste 5 into the through hole 1 is performed in a plurality of numbers of times by using the squeegee 4 whose attack angle is different between the lower end on the side of the movement direction of the squeegee 4 and the surface of the screen 3. A final squeegee 4 whose attack angle is largest is used.