METHOD FOR ARRANGING PHASE SHIFTER, METHOD FOR DESIGNING LAYOUT PATTERN, DEVICE FOR ARRANGING PHASE SHIFTER AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To obtain a method for arranging a phase shifter by which processing time can be reduced. SOLUTION: In a step 31, a CPU obtains potential information from the layout pattern data stored in a first file 21. Then, in a step 32, the CPU arranges the phase shifter having the same phase to the layout pattern having the same potential information based on the potential information of the layout pattern onto the adjacent layout pattern.