SILICON NITRIDE-BASED MOLYBDENUM SILICIDE CARBIDE COMPLEX, ITS PRODUCTION AND CERAMIC HEAT USING SILICON NITRIDE- BASED MOLYBDENUM SILICIDE CARBIDE COMPLEX

摘要

PROBLEM TO BE SOLVED: To obtain a silicon nitride-based molybdenum silicide carbide complex having more improved high-temperature strength, oxidation resistance and toughness, to provide a method for producing the complex and a ceramic heater using the complex. SOLUTION: This silicon nitride-based molybdenum silicide carbide complex contains a molybdenum silicide carbide having >0 and <=10 μm particle diameter in a silicon nitride-based ceramic. This method for producing the complex comprises baking MoSi2 or Mo5Si3 at a temp. of >=1600 deg.C in a nitrogen or argon atmosphere in a baking furnace containing carbon so as to form Mo5-xSi3 C1-y.