发明名称 |
Liquid crystal display having an active matrix substrate with thermosetting inter-layer insulating film with a thickness of greater than 2 mu M |
摘要 |
In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10 DEG C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45 DEG to 60 DEG .
|
申请公布号 |
US6084653(A) |
申请公布日期 |
2000.07.04 |
申请号 |
US19990248282 |
申请日期 |
1999.02.11 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
SHIMADA, YOSHINORI;NAKATA, YUKINOBU;YAMAMOTO, AKIHIRO |
分类号 |
G02F1/1333;G02F1/13;G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;H01L29/786;(IPC1-7):G02F1/13 |
主分类号 |
G02F1/1333 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|