| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser device which can easily transport a camber provided with a through-flowing fan supported in non-contact basis with a magnetic bearing. SOLUTION: In the structure, magnetic bearings 12, 12 for supporting, on the non-contact basis, a rotating shaft 3 of the through-flowing fan 1 for circulating the laser gas sealed within a chamber 2 with an electro-magnetic force attained when a current is applied from the power source of the excimer laser device are provided. Moreover, a rotating shaft holding mechanism is provided to hold the rotating shaft 3 to the chamber when a current of the magnetic bearings 12, 12 is cut off. This rotating shaft holding mechanism is a clamp 23 which may be operated from the outside of the chamber 2 and mechanically hold the rotating shaft 3 of the through-flowing fan 1 by expanding the film with a hydraulic circuit which is shielded for laser gas or a standby battery which supplies a current to the magnetic bearings 12, 12 in addition to the power source of the excimer laser device and can be transported together with the chamber 2. |
