| 摘要 |
PROBLEM TO BE SOLVED: To prevent frame resist from peeling off and to prevent an unnecessary plating film from being formed on the under surface of the resist in the manufacture of a thin-film magnetic head which has an upper magnetic pole layer formed of soft magnetic alloy with high saturation magnetic flux density by plating. SOLUTION: For the manufacture of the thin-film magnetic head including a process for forming the upper magnetic pole layer by a frame plating method by forming the frame resist patterned in a specific shape after a lower magnetic pole layer 10, a gap layer 11, a coil layer 13, and an insulating layer 14 covering the coil layer 13 are laminated, the resist 22 is cured by irradiating the patterned frame resist 22 with electron beams before the upper magnetic pole layer is formed by plating.
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