PROCESS FOR PRODUCING SILICA BY DECOMPOSITION OF AN ORGANOSILANE

摘要

A process for producing a high-purity optical silica preform, comprising (a) vaporization of an organosilicon compound; (b) thermal decomposition of the said organosilicon compound in the vapour state, to give amorphous fused silica particles; (c) deposition of the said amorphous fused silica particles on a support, in which the said organosilicon compound has the formula (I) (see above formula) in which R1, R2, R3 and R4 have the meanings given in the text.