METHOD OF PRODUCING LIGHT MODULATION DEVICE AND PROJECTOR

摘要

There is provided a method of manufacturing a light modulation device that does not produce scattered reflection comprising: a step A of forming a release layer whereby a release layer that produces separation in response to irradiation with incoming light is formed on a heat-resistant substrate having the capability of withstanding heat; a step B of forming a piezoelectric layer whereby a piezoelectric layer is formed on the release layer; a patterning step D whereby an electrode pattern is formed in respect of the piezoelectric layer and mirror elements are formed at each pixel; a connection step E of electrically connecting the active element substrate wherein active elementary elements are provided for each pixel and the piezoelectric layer laminated on the heat-resistant substrate such that the active elements correspond to mirror elements; and an irradiating separation step G whereby separation is produced in the release layer by irradiating the release layer with irradiating light from the side of the heat-resistant substrate.