发明名称 |
Lateral stress relief mechanism for vacuum bellows |
摘要 |
An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween. |
申请公布号 |
EP1014420(A2) |
申请公布日期 |
2000.06.28 |
申请号 |
EP19990310266 |
申请日期 |
1999.12.20 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
PLESS, ALEXANDER FRAZIER;ROSEN, GARY JAY;WEED, ALLAN DANA;ALLEN, ERNEST EVERETT JR.;BENVENISTE, VICTOR MAURICE;JUSTESEN, PERRY JOHN INGUARD |
分类号 |
H01L21/265;F16J3/04;F16L51/02 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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