AN ACCELEROMETER WITH A SYMMETRICALLY BONDED PROOF-MASS AND METHOD OF ITS FABRICATION METHOD

摘要

This invention relates to a cantilever beam microaccelerometer symmetrically bonded proof-mass comprised of a lower portion having a cantilever (2), a lower proof-mass (1b) and a support (9) which are integrally formed on one side of the unique and homogeneous silicon plate so as to easily install a piezoresistive material (3) for detecting acceleration, self-diagnostic resistors (4) for determining whether the cantilever (2) is damaged or not, and a lead wire (14) on the other side of the plate unfabricated; and an upper portion includes a upper proof-mass (1a) which is same material and size as those of the lower proof-mass (1b) and symmetrically bonded on the unfabricated plane of the plate with respect to the cantilever.