发明名称 |
LOW-COST, SIMPLE MASS PRODUCTION OF LIGHT-GUIDING TIPS |
摘要 |
<p>The present invention concerns light-guiding tips and a method of making the same. A method of manufacturing a light-guiding element with at least one tip having an aperture at its apex for light to pass through said aperture comprising the steps of: forming a tip-like indent in a substrate; depositing a light-guiding photoresist layer which fills the tip-like indent and covers at least a part of the substrate; and structuring the photoresist layer to form the light-guiding element out of the photoresist.</p> |
申请公布号 |
EP1012670(A1) |
申请公布日期 |
2000.06.28 |
申请号 |
EP19990926701 |
申请日期 |
1999.07.08 |
申请人 |
CARL ZEISS JENA GMBH |
发明人 |
ANDREOLI, CORNEL;BRUGGER, JUERGEN, P.;DRECHSLER, UTE;VETTIGER, PETER |
分类号 |
G01Q60/18;G02B21/00;G03F7/00;G03F7/004;(IPC1-7):G03F7/00 |
主分类号 |
G01Q60/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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