发明名称 LOW-COST, SIMPLE MASS PRODUCTION OF LIGHT-GUIDING TIPS
摘要 <p>The present invention concerns light-guiding tips and a method of making the same. A method of manufacturing a light-guiding element with at least one tip having an aperture at its apex for light to pass through said aperture comprising the steps of: forming a tip-like indent in a substrate; depositing a light-guiding photoresist layer which fills the tip-like indent and covers at least a part of the substrate; and structuring the photoresist layer to form the light-guiding element out of the photoresist.</p>
申请公布号 EP1012670(A1) 申请公布日期 2000.06.28
申请号 EP19990926701 申请日期 1999.07.08
申请人 CARL ZEISS JENA GMBH 发明人 ANDREOLI, CORNEL;BRUGGER, JUERGEN, P.;DRECHSLER, UTE;VETTIGER, PETER
分类号 G01Q60/18;G02B21/00;G03F7/00;G03F7/004;(IPC1-7):G03F7/00 主分类号 G01Q60/18
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