| 摘要 |
<p>PROBLEM TO BE SOLVED: To develop a method and its device capable of correctly setting a focal position of a machining laser onto the surface of a workpiece. SOLUTION: A focal position of a laser beam 3 which is directed to a workpiece 2 is adjusted using a focusing optical arrangement 4 provided in a machining head 1. First, plural tracks which are mutually separated are burned onto the surface of the workpiece 2 with the aid of the laser beam 3 by making a distance between the machining head 1 and the workpiece 2 differ to respective tracks under the same condition with respect to the other point. The intensity of plasma 5 generating at this time is individually measured to each track. A height adjusting device 6 is driven to adjust and calibrate the focal position with a machining controller 7 based on the distance between the laser machining head 1 in which the maximum plasma intensity is measured and the workpiece 2.</p> |
