| 摘要 |
PROBLEM TO BE SOLVED: To produce an ozone-containing ultrapure water less in impurities and to maintain the dissolved ozone concentration constant even during a long distance transportation by bringing ozone-containing gas into contact with an ultrapure water to purify it, then feeding it to a suction part of an ejector that the ultrapure water is fed by pressure. SOLUTION: The ozone-containing gas produced with an ozone generator 1 is brought into contact with the ultrapure water in a gas washing device 2, then the impurities in the gas are removed and purified, and then the gas is passed through a gas introduction tube 3 to be fed to the suction part of the ejector 4. The ultrapure water produced with an ultrapure water production device 5 is forcedly fed to one end of the ejector 4 with a pump 6. The ozone- containing gas is mixed with the ultrapure water by the ejector 4, and while ozone-containing ultrapure water is produced, the water is transported to a use point through a transfer tube 7 as a gas-liquid mixed fluid. Thus, since the ozone-containing ultrapure water being clean and pressurized to be higher than the atmospheric pressure can be easily produced, it can be economically transported from one production device to many use points.
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