| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for flattening between surfaces made of at least two different materials by minimizing a flattening effect and on the other hand, by certainly and completely removing an embedded article out of a filling region. SOLUTION: Firstly, a first layer 26 having at least one recessed part 30 is prepared as an object. A second layer 34 is accumulated on the whole of the first layer 26. The second layer 34 has larger thickness than depth of the recessed part 30. The second layer 34 is made of a material different from that of the first layer 26. In the next step, the second layer 34 is completely removed beyond a regional area of at least one piece of the recessed part 30. Removal of a residual part 34a of the second layer is carried out until the second layer 34 and the first layer 26 are flattened.
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